Passivity Based Control and Optimization of a Silicon Process
نویسندگان
چکیده
In this paper we develop a Real Time Optimization (RTO) strategy for a silicon reactor. The reactor dynamics are described using parabolic partial differential equations with countercurrent liquid, gas and solid flow with chemical reaction. The model equations are converted to a system of differential algebraic equations using the method of lines and up-winding approximation for the spatial derivatives. The model parameters are matched to industrial data by minimizing a quadratic objective function using a novel interior point SQP method. The dynamic response has been verified and we have shown that passivity based inventory control can be used to stabilize the process at its optimal operating point.Copyright c ©2005 IFAC
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تاریخ انتشار 2005